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Microhotplates with TiN heaters - 百度学术
WebJan 11, 2011 · The entire synthesis takes place on the microscale on a micromachined hotplate, without the use of photolithography, taking advantage of the device’s built-in heater. Well-aligned multiwalled CNT forests were grown directly on microhotplates at 600 °C using a bimetallic iron/alumina composite catalyst and acetylene as precursor. WebNov 17, 2008 · Tungsten-Based SOI Microhotplates for Smart Gas Sensors. Abstract: This paper is concerned with the design, fabrication, and characterization of novel high … healthy chicken sandwich
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